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经营范围
发明名称
ETCHING DEVICE
摘要
申请公布号
JPH0382124(A)
申请公布日期
1991.04.08
申请号
JP19890217353
申请日期
1989.08.25
申请人
HITACHI LTD
发明人
SAITO HIDETAKA
分类号
H01L21/306
主分类号
H01L21/306
代理机构
代理人
主权项
地址
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