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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0382160(A)
申请公布日期
1991.04.08
申请号
JP19890219130
申请日期
1989.08.25
申请人
NEC KANSAI LTD
发明人
TANAKA TAKASHI
分类号
H01L29/744;H01L29/74;H01L29/747
主分类号
H01L29/744
代理机构
代理人
主权项
地址
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