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发明名称
SELECTIVE FORMATION OF METALLIC FILM
摘要
申请公布号
JPH0382127(A)
申请公布日期
1991.04.08
申请号
JP19890218848
申请日期
1989.08.25
申请人
SONY CORP
发明人
KIYOTA HISAHARU
分类号
H01L21/3205;H01L21/28;H01L21/285;H01L21/768
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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