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发明名称
VAPOR GROWING APPARATUS
摘要
申请公布号
JPH0380529(A)
申请公布日期
1991.04.05
申请号
JP19890216305
申请日期
1989.08.23
申请人
FUJITSU LTD
发明人
TANAKA HITOSHI
分类号
H01L21/205;H01L21/31
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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