| 摘要 |
PURPOSE:To enable a swing angle and swing angular velocity to be detected accurately and improve bonding productivity by calculating a swing angle and swing angular velocity of a swing arm according to an output signal from a photodetector for detecting a light-emitting element. CONSTITUTION:A bracket 10 is fixed to a moving coil 4 and a light-emitting diode 11 is mounted to the tip part of this bracket 10 so that optical axis may be vertical to the swing surface. On the other hand, a two-dimensional PSD element 13 is mounted in a direction opposing the light-emitting diode 11 at a base 12, thus enabling the position within the swing surface of the light- emitting diode 11 to be measured. This position information is set to an arithmetic operation device 14 and is converted to a swing angle signal and swing angular velocity signal.By controlling the current of the moving coil 4 with this swing angle signal and swing angular velocity signal, the displacement of capillary and bonding speed can be set arbitrarily. Since it is possible to adjust bonding conditions finely, a stable bonding is possible, thus enhancing bonding productivity. |
