PROBE,申请号JP19890216211-传众专利搜索

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发明名称	PROBE
摘要
申请公布号	JPH0379054(A)	申请公布日期	1991.04.04
申请号	JP19890216211	申请日期	1989.08.22
申请人	MITSUBISHI ELECTRIC CORP	发明人	NISHIMURA KAZUHIRO
分类号	G01R31/26;G01R1/073;G01R31/00;H01L21/66	主分类号	G01R31/26
代理机构		代理人
主权项
地址

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