| 摘要 |
PURPOSE:To prevent the deformation in the AlN sintered body caused by the sticking of the bottom face of the sintered body with buried powder or a vessel, at the time of sintering a green compact of which a highly volatilizable sintering assistant is added to AlN powder, by covering the bottom face of the green compact with AlN polytype powder. CONSTITUTION:At the time of sintering a green compact of which an easily volatilizable sintering assistant such as alkaline earth metal compounds, YF3 or the like is added to AlN powder, the bottom face of the green compact is covered with the powder of AlN polytype (an AlN-SiO2 series compound) or with a mixture of which a sintering assistant of the same kind as the sintering assistant used for the green compact to prevent the sticking of the bottom face of the green compact with buried powder or a vessel. |
