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发明名称
ION SOURCE
摘要
申请公布号
JPH0378954(A)
申请公布日期
1991.04.04
申请号
JP19890215081
申请日期
1989.08.23
申请人
HITACHI LTD
发明人
KAWACHI GENJIROU;MIMURA AKIO;ONO YASUNORI
分类号
C23C14/48;H01J27/08;H01J37/317;H01L21/265
主分类号
C23C14/48
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