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发明名称
CONTROL SYSTEM FOR SEMICONDUCTOR VAPOR GROWTH DEVICE
摘要
申请公布号
JPH0380187(A)
申请公布日期
1991.04.04
申请号
JP19890216505
申请日期
1989.08.22
申请人
NEC CORP
发明人
TAZAKI YOSHIYUKI
分类号
C30B25/16;C23C16/52;H01L21/205
主分类号
C30B25/16
代理机构
代理人
主权项
地址
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