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发明名称
METHOD AND DEVICE FOR FILM FORMATION BY VACUUM VAPOR DEPOSITION
摘要
申请公布号
JPH0379757(A)
申请公布日期
1991.04.04
申请号
JP19890216593
申请日期
1989.08.23
申请人
TOSHIBA CORP
发明人
SHIODA KAZUNORI
分类号
C23C14/30
主分类号
C23C14/30
代理机构
代理人
主权项
地址
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