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发明名称	ALIGNER
摘要
申请公布号	JPH0378225(A)	申请公布日期	1991.04.03
申请号	JP19890215249	申请日期	1989.08.21
申请人	MITSUBISHI ELECTRIC CORP	发明人	HIROSUE MASAHIRO
分类号	G03F7/20;H01L21/027;H01L21/30	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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