| 发明名称 |
Improved contact printing process. |
| 摘要 |
<p>Disclosed is a method for increasing the resolution in contact printing operations by ensuring an intimate contact between the mask (17) and photoresist (13). A flow of air is directed at the underside (12) of the workpiece (10) being printed while the mask is in place to provide pressure for the necessary contact.</p> |
| 申请公布号 |
EP0420526(A2) |
申请公布日期 |
1991.04.03 |
| 申请号 |
EP19900310379 |
申请日期 |
1990.09.21 |
| 申请人 |
AMERICAN TELEPHONE AND TELEGRAPH COMPANY |
发明人 |
DALTON, WILLIAM FOREST;MICKS, HENRY BALDWIN, JR. |
| 分类号 |
G03B27/20;G03F7/20;H05K3/00 |
主分类号 |
G03B27/20 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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