发明名称 WIRE BONDING METHOD
摘要 PURPOSE:To permit the connection of a wire without applying damage to a bonded member side and without decreasing wire strength by a method wherein the load of a bonding tool is increased at the initial stage and then, the load is decreased to the optimum value. CONSTITUTION:Load transfer is performed by stopping current application to a solenoid coil 5. Now, with a current applied to the solenoid coil 5, a plunger 8 moves left to engage an arm 9 with a stopper 10. The present load of a bonding tool 3 is decided by the plunger attraction force of the solenoid coil 5. The initial high load shortens attenuation time for wire vibration and when current application is stopped at an attenuation point, the plunger 8 is released and the load of the bonding tool 3 depends on a balance coil spring 6 only to provide the wire with the optimum load.
申请公布号 JPS57155739(A) 申请公布日期 1982.09.25
申请号 JP19810041118 申请日期 1981.03.20
申请人 FUJITSU KK 发明人 KOJIMA HARUO
分类号 H01L21/607;H01L21/60 主分类号 H01L21/607
代理机构 代理人
主权项
地址