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发明名称
PATTERNING A TRANSPARENT CONDUCTOR
摘要
申请公布号
EP0411530(A3)
申请公布日期
1991.04.03
申请号
EP19900114580
申请日期
1990.07.30
申请人
FUJITSU LIMITED
发明人
MIYAGAKI, SHINJI, C/O FUJITSU LTD.;RI, SEIGEN, C/O FUJITSU LTD.
分类号
H01L21/302;H01L21/306;H01L27/146;H01L31/18;(IPC1-7):H01L21/306
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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