PRECISION XY STAGE,申请号JP19890215177-传众专利搜索

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发明名称	PRECISION XY STAGE
摘要
申请公布号	JPH0378008(A)	申请公布日期	1991.04.03
申请号	JP19890215177	申请日期	1989.08.21
申请人	NEC CORP	发明人	KAKIMOTO MEGUMI
分类号	G05D3/00;G05D3/12	主分类号	G05D3/00
代理机构		代理人
主权项
地址

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