| 摘要 |
PURPOSE:To ensure constant communication of the vacuum channel of a tool with a vacuum source even while the tool is rotating by forming the vacuum channel between an outer cylinder and a rotatable guide nut. CONSTITUTION:A vertical moving body has a guide nut 36 which is rotatable around a shaft 27 through a bearing 38. A groove 40 is provided at the whole periphery of the shaft 27 where vacuum pipe 39 reaches, so that the vacuum channel 31 of a tool can communicate with the pipe 39 through an opening 40A and the groove 40 if the shaft 27 rotates in the nut 36. A nut 37 is fixed on an outer cylinder 29 and rotates with the rotation of the shaft 27. The channel 31 is sealed with an O-ring 41 in the nut 37 and sealed hermetically with an O-ring 42 which is associated with the bearing 38 and the groove 40 in the nut 36. Therefore, the vacuum channel of the tool can communicate surely with a vacuum source even if the tool rotates. |
