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发明名称
HEAT TREATMENT DEVICE
摘要
申请公布号
JPH0376227(A)
申请公布日期
1991.04.02
申请号
JP19890212475
申请日期
1989.08.18
申请人
NEC CORP
发明人
ONO YASUO
分类号
H01L21/324
主分类号
H01L21/324
代理机构
代理人
主权项
地址
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