发明名称 |
GLOW DISCHARGE METAL DEPOSITION ON NON-CONDUCTOR FROM ORGANOMETALLIC COMPOUND |
摘要 |
OF THE DISCLOUSRE The invention provides a process for the production of electrically conductive structures on non-conduc-tors in which a metallic coat is deposited by the decomposition of organometallic compounds in a glow discharge zone. |
申请公布号 |
CA1282367(C) |
申请公布日期 |
1991.04.02 |
申请号 |
CA19860504734 |
申请日期 |
1986.03.21 |
申请人 |
SUHR, HARALD |
发明人 |
SUHR, HARALD;OEHR, CHRISTIAN;FEURER, ERNST |
分类号 |
C23C16/18;C23C16/50;H05K3/14;H05K3/24 |
主分类号 |
C23C16/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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