| 摘要 |
PURPOSE:To precisely detect an abnormal part by detecting dirt or deformation in a curved outline part such as an ellipse by the abnormality of the outline part itself such as deformation. CONSTITUTION:The scanning data 15A to 15D of a dirty part 15 obtained by respective scanning lines 11 to 14 and the scanning data 16A, 16B of a deforma tion part 16 obtained by the scanning lines 11, 12 are shown and a difference 17 in height formed between the adjacent scanning lines in the scanning data 16A is also shown in figure. The horizontal part of a binary image to be an elliptical outline is scanned up to down and down to up by a Y direction scanner and its vertical part is scanned from left to right and right to left by an X direction scanner. When data between the adjacent scanning lines of the obtained scanning data are compared with each other, the difference shown in 17 is obtained, the deformation part 16 is detected by the difference and the dirty part 15 can be similarly detected. |
