| 摘要 |
PURPOSE: To integrate a cascade compressor in an electronic element by connecting a plurality of micro membrane pumps tandem-connected to perform mechanical action in parallel through input/output channels and valves. CONSTITUTION: Micro membrane pumps P1-P3 (in the number of (n), possibly) tandem-connected to perform mechanical action are separated to two stroke chambers A, B by membranes M1-M3. Stroke chambers P1-B and P2-A, P2-B and P3-A, P3-B and the next stroke chamber are connected to each other by input/output channels D21-A, D31-A, D41-A, D21-B, D31-B, C11-A, C21-A, C11-B, C21-B, and C31-B having valves V11-A, V21-A, V31-B, V11-A, V21-B. The cascade compressor can thus be integrated in an electronic element such as a semiconductor chip. |
