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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0370128(A)
申请公布日期
1991.03.26
申请号
JP19890206007
申请日期
1989.08.09
申请人
FUJITSU LTD
发明人
ABE YASUNARI
分类号
H01L23/52;H01L21/28;H01L21/3205;H01L21/321;H01L21/60
主分类号
H01L23/52
代理机构
代理人
主权项
地址
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