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发明名称
MANUFACTURING APPARATUS OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0369117(A)
申请公布日期
1991.03.25
申请号
JP19890206184
申请日期
1989.08.08
申请人
NEC KYUSHU LTD
发明人
TOMINAGA YOSHIHIRO
分类号
H01L21/205;H01L21/22;H01L21/223;H01L21/31
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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