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发明名称
SEMICONDUCTOR MANUFACTURING DEVICE
摘要
申请公布号
JPH0369110(A)
申请公布日期
1991.03.25
申请号
JP19890206181
申请日期
1989.08.08
申请人
NEC KYUSHU LTD
发明人
NAKAMURA MASATOSHI
分类号
G03F7/16;B05C11/08;H01L21/027
主分类号
G03F7/16
代理机构
代理人
主权项
地址
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