| 发明名称 |
QUANTITATIVE DETERMINATION METHOD OF CHEMICALS FOR PROCESSING SEMICONDUCTOR AND AN APPARATUS THEREOF |
| 摘要 |
The present invention relates to a quantitative determination method of a medicament for processing semiconductor by near-infrared spectrometry at 800 - 1400 nm and an apparatus which is adapted to the practice of said method. According to the present invention, concentration of an aqueous solution of the medicament can be determined without drawbacks of the prior methods. |
| 申请公布号 |
CA2025766(A1) |
申请公布日期 |
1991.03.21 |
| 申请号 |
CA19902025766 |
申请日期 |
1990.09.19 |
| 申请人 |
KURASHIKI BOSEKI KABUSHIKI KAISHA |
发明人 |
KOASHI, KATSUE;YOKOTA, HIROSHI;YANAI, NAOKI |
| 分类号 |
G01N21/31;G01N21/35;(IPC1-7):G01N21/25 |
主分类号 |
G01N21/31 |
| 代理机构 |
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