VERFAHREN ZUR X:1-ABBILDUNG VON MASKENSTRUKTUREN,申请号DD19850280625-传众专利搜索

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发明名称	VERFAHREN ZUR X:1-ABBILDUNG VON MASKENSTRUKTUREN
摘要
申请公布号	DD288271(A5)	申请公布日期	1991.03.21
申请号	DD19850280625	申请日期	1985.09.16
申请人	VEB ZFT MIKROELEKTRONIK,DD	发明人	KALZ,ANDREAS,DD;HAASE,NORBERT,DE
分类号	G03F7/26;H01L21/26;H01L21/32;(IPC1-7):H01L21/26	主分类号	G03F7/26
代理机构		代理人
主权项
地址

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