发明名称 SEMICONDUCTOR DEVICE
摘要 A semiconductor epitaxial layer is formed by misorienting the planar azimuth of single-crystal substrate by 0.1 to 1 degree from plane (111)B and forming the layer by molecular beam epitaxy. The method is described as applied to the fabrication of a GRIN-SCH semiconductor laser of improved quality.
申请公布号 GB2202371(B) 申请公布日期 1991.03.20
申请号 GB19870006194 申请日期 1987.03.16
申请人 * SHARP KABUSHIKI KAISHA 发明人 TOSHIRO * HAYAKAWA;TAKAHIRO * SUYAMA;MASAFUMI * KONDO;KOHSEI * TAKAHASHI;SABURO * YAMAMOTO
分类号 H01L21/203;H01L21/20;H01L21/26;H01S5/00 主分类号 H01L21/203
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