SUBSTRATE FOR COLOR FILTER

摘要

PURPOSE:To lower the stresses in transparent conductive films without making patterning of the transparent conductive films difficult by forming transparent electrodes of laminated films of the 1st transparent conductive film exhibiting a compressive stress and the transparent conductive film exhibiting a tensile stress. CONSTITUTION:The transparent electrodes to be formed on the upper layer of color filters 4 are made of the laminated structure consisting of the 1st transparent conductive film 61 exhibiting the compressive stress and the 2nd transparent conductive film 62 exhibiting the tensile stress, by which the combined stresses of both can be selected to 0 or the value nearly 0. The combined stresses in the films of the transparent electrodes 7 are extremely diminished to eliminate the cause for cracking, by which the need for deliberately increasing the temp. for film formation is eliminated. The patterning is facilitated in this way and the good patterns are obtd.