Fe-Si-Al alloy magnetic thin film and method of manufacturing the same.
摘要
<p>A Fe-Si-A l alloy magnetic thin film contains a limited oxygen content in the range 0.17 to 0.46 wt % and has excellent magnetic and mechanical properties. The film is made by sputtering in an inert gas atmosphere containing a controlled concentration of oxygen amounting to 400 to 1500 volumetric ppm if the sputtering target is a cast film, while the oxygen content is reduced by an amount dependent on the initial concentration of oxygen in the sputtering target when the target is a sintered target containing oxygen.</p>
