| 摘要 |
PURPOSE:To prevent the contamination of a material to be treated with dust and the leakage of a gas by separating the device into a preceding chamber part and a treating chamber part and providing a partition wall to make the respective pressures in both parts controllable. CONSTITUTION:The atmospheric-pressure treating device is formed by the preceding chamber part 200, the adjacent treating chamber part 300 separated by a second partition wall 119, air conditioners 102 and 117 having the clean filters 103 and 116 independently provided in both parts 200 and 300, exhaust ducts 109 and 11 1 and a pressure control part 122. A holder 107 for a material 121 to be treated is set in the part 200, and its working plane is divided by a first partition wall 120. The ducts 109 and 111 are independently set in both parts 200 and 300 and provided with exhaust amt. controllers 112 and 113. The outputs of the air conditioners 102 and 117 and the exhaust amt. of the exhaust ducts 109 and 111 are controlled by the control part 122, and the pressures in both parts 200 and 300 are controlled. |
