发明名称 Electron microscope
摘要 An electron microscope equipped with a specimen positioning device for moving specimen holders within a place perpendicular to the optical axis of the electron beam between the upper and lower magnetic pole pieces of the objective lens and bringing the holders onto the optical axis. The microscope has a member extending through the side wall of the yoke of the objective lens, a preliminary chamber connected with the side wall of the yoke via a valve, and an exchange mechanism. The member can mount and dismount the specimen holders. The plural holders are placed in position within the chamber. The exchange mechanism can mount and dismount the specimen holder placed at a certain position within the chamber and can move this holder between the magnetic pole pieces of the objective lens from the chamber to the member or vice versa. Once the inside of the lens is evacuated to a high vacuum, a plurality of specimens can be observed successively.
申请公布号 US5001350(A) 申请公布日期 1991.03.19
申请号 US19900568639 申请日期 1990.08.16
申请人 JEOL LTD. 发明人 OHI, KIMIO;KASAI, TOHRU
分类号 H01J37/16;H01J37/20 主分类号 H01J37/16
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