| 摘要 |
This pressure sensor comprises a housing having a cavity at at least one end portion thereof, a pressure detecting element provided with the cavity and generating an electric signal corresponding to the pressure detected, a transmitter for transmitting the signal to the outside of the housing, and hermetically sealed with one end thereof connected to the pressure detecting element, a sealed medium provided within the cavity to prevent deterioration of the pressure detecting element, a diaphragm provided to cover the surface of the cavity, and a sealing element for sealing the sealed medium within the cavity and provided in a portion connected to the cavity of the housing, and further, a sealing ability of either the hermetic seal portion of the transmitter or of the sealing element is improved by utilizing a back pressure of a pressure medium. The sealing ability is improved by either making both surfaces of a diaphragm and of a sealing element form a common surface of the housing, by forming a grooved portion surrounding the hermetic terminal, or by attenuating the diameter of the top end portion of the housing. Leakage of the sealing liquid from the hermetic terminal or the sealing element is thus effectively prevented, and the reliability of the mechanical strength of the connecting portion of the housing and the device on which the housing is installed is improved, and thus a high reliability semiconductor pressure sensor to be used for detecting the pressure of a high pressure medium can be obtained.
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