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发明名称
DEPOSIT REMOVING DEVICE
摘要
申请公布号
JPH0364026(A)
申请公布日期
1991.03.19
申请号
JP19890199458
申请日期
1989.08.02
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
YASUDA KAZUMITSU
分类号
B01J19/00;C23F4/00;H01L21/205;H01L21/302;H01L21/3065
主分类号
B01J19/00
代理机构
代理人
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