| 摘要 |
PURPOSE:To produce the high-quality lens arrays with high efficiency by using a laser CVD method by converting an exit beam by an intensity distribution converter to a uniform intensity and subjecting a substrate to deflection irradiation perpendicularly thereto via a deflection optical system. CONSTITUTION:The exit beam of a laser light source 1 is passed, shut off or modulated by an optical switch 2. This beam is converted to the intensity distribution uniform in the sectional direction of the optical axis by an intensity distribution conversion system 4. The beam is then deflected at a prescribed angle by the deflecting optical system 5 and the substrate 9 is perpendicularly irradiated with the deflected beam through a window part 7 of a CVD reaction cell 8 by a condenser lens 6. A gaseous material is previously introduced into the CVD reaction cell 8 is discharged to a discharge treating system 12 after the CVD reaction. The substrate 9 is, therefore, irradiated with the exit beams at a specified scanning speed with the uniform energy of the respective spots and the microlens arrays having a uniform shape are efficiently formed thereon. |
