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发明名称
CRUCIBLE FOR VAPOR SOURCE
摘要
申请公布号
JPH0364454(A)
申请公布日期
1991.03.19
申请号
JP19890199567
申请日期
1989.08.01
申请人
MITSUBISHI ELECTRIC CORP
发明人
YAMANISHI KENICHIRO;TSUKASAKI TAKASHI
分类号
C23C14/24;C23C14/30;C23C14/32
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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