| 摘要 |
PURPOSE:To prevent the expansion of X rays due to diffusion, to make it possible to bring an X-ray generator and a sample close together and to improve analyzing accuracy by utilizing an X-ray source formed by excitation with an electron beam, and arranging an electron-beam generating part, the X-ray source, the sample, an X-ray spectral crystal and a detector in the same vacuum body. CONSTITUTION:An electron beam 8 generated from an electron gun 7 is narrowed to a small diameter of several mum or less through an electromagnetic lens which is not shown. The electron beam is projected on an X-ray generating target 9. Thus, X-rays 10 are generated in the target 9 and projected on a sample 6 through an electron-beam shielding filter 12. The filter 12 is the filter which prevents the input of higher energy electrons reflected from the surface of the target 9 into an X-ray detector 17. The filter is provided between the sample 6 and an X-ray spectral crystal 14 and the like. The X-rays 10 projected on the sample 6 undergoes specific absorption of the sample 6. The X-rays 10 are transmitted through the sample 6 and inputted into the crystal 14. In the crystal 14, the X-rays are diffracted under the Bragg diffraction condition of nlambda=2d.sintheta and undergo spectroscopy. Then, the X rays are inputted into an X-ray detector 17 through a slit 16, and the intensity is measured with an X-ray measuring circuit 18. |
