METHOD AND DEVICE FOR FORMING INORGANIC FILM

摘要

PURPOSE:To form a diamond film having a uniform thickness and a large area at a high rate by feeding gaseous starting material into the linear gap between the anode and the cathode, forming an alternating magnetic field, moving plasma back and forth along the gap and jetting the plasma. CONSTITUTION:The anode 1 and the cathode 2 are set with a gap in-between so that arc discharge can be caused in the gap. Gaseous starting material is fed into the linear gap and plasma is generated. An alternating magnetic field is formed in the plasma generated region with a magnetic field forming means 5 and the plasma is moved back and forth along the gap and jetted to form a thin film of diamond, etc., on a substrate 8.