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发明名称
MANUFACTURE OF POLYCRYSTALLINE SILICON FILM
摘要
申请公布号
JPH0360017(A)
申请公布日期
1991.03.15
申请号
JP19890195814
申请日期
1989.07.27
申请人
SANYO ELECTRIC CO LTD
发明人
KURIYAMA HIROYUKI;NAKAYAMA SHOICHIRO;NOGUCHI SHIGERU;SANO KEIICHI;IWATA HIROSHI
分类号
H01L21/20;H01L21/324
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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