ELECTRODE OF PLASMA CVD DEVICE,申请号JP19890193898-传众专利搜索

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发明名称	ELECTRODE OF PLASMA CVD DEVICE
摘要
申请公布号	JPH0360022(A)	申请公布日期	1991.03.15
申请号	JP19890193898	申请日期	1989.07.28
申请人	FUJITSU LTD	发明人	OBARA HITOSHI;SHIMANE KAZUO
分类号	C23C16/50;H01L21/205;H01L21/31	主分类号	C23C16/50
代理机构		代理人
主权项
地址

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