| 摘要 |
<p>PURPOSE: To enable to correct an enlargement error related to an X-ray mask by adhering a thin film having a relatively low dielectric constant on a conductive substrate, before adhering a piezoelectric film having a high dielectric constant. CONSTITUTION: A thin film 12, having a relatively low dielectric constant, is adhered on a conductive substrate 10. Dielectric constant of this thin film 12 isε<10 and is formed by silicon oxide (SiO2 ), silicon nitride, boron nitride(BN) or polyimide. After adhering the thin film 12 of the low dielectric constant, a piezoelectric film 14 of a high dielectric constant is adhered. The dielectric constant of this film is to beε>500. A reed screen-shaped electrode arrangement 16 is applied, and a relatively uniform electric field crossing the gap between the interdigital electrodes in the piezoelectric film 14 can be achieved.</p> |
