LASER ANNEALING DEVICE,申请号JP19890195811-传众专利搜索

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发明名称	LASER ANNEALING DEVICE
摘要
申请公布号	JPH0360015(A)	申请公布日期	1991.03.15
申请号	JP19890195811	申请日期	1989.07.27
申请人	SANYO ELECTRIC CO LTD	发明人	KURIYAMA HIROYUKI;SANO KEIICHI;IWATA HIROSHI;NOGUCHI SHIGERU;NAKAYAMA SHOICHIRO
分类号	H01L21/20;H01L21/268	主分类号	H01L21/20
代理机构		代理人
主权项
地址

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