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发明名称
SCHALTUNGSANORDNUNG ZUR AUTOMATISCHEN REGELUNG DES ANPASSUNGSZUSTANDES EINES FREMDERREGTEN HOCHFREQUENZ-GENERATORS IN HOCHFREQUENZ-PLASMASTROMVERSORGUNGEN
摘要
申请公布号
DD288041(A5)
申请公布日期
1991.03.14
申请号
DD19890332690
申请日期
1989.09.15
申请人
VEB ELEKTROMAT DRESDEN,DE
发明人
BIRUS,DIETRICH,DE;RAENSCH,CHRISTIAN,DE;FENDLER,REINHARD,DE
分类号
H03L7/16;(IPC1-7):H03L7/16
主分类号
H03L7/16
代理机构
代理人
主权项
地址
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