| 摘要 |
PURPOSE:To manufacture the soft magnetic alloy having excellent magnetic characteristics by executing sputtering onto a target having specified compsn. constituted of Fe, V, Cr, Mn, Al, Cu, Nb, Si and B and heating the obtd. thin film to a specified temp. CONSTITUTION:Sputtering by an impact gas such as Ar is executed onto a target of a raw material alloy in which objective compsn. is regulated to (Fe1-aMa)100-x-y-zCuxNbySizBw (where M denotes at least one kind among V, Cr, Mn and Al and 0<=a<=0.2, 0.5<=x<=2.5, 0.5<=y<=5.0, 0.5<=z<=20 and 5<=w<=20 are regulated). The generated metallic vapor is deposited on a substrate to form a film. Next, the thin film is sufficiently heated at 460 to 580 deg.C. By the heating treatment, a crystalline mixed phase of 20<=alpha-Fe<=35%, 45<=Fe3Si<=70% and 10<=Fe2B<=20% is formed by >=80%, preferably almost 100% and the balance amorphous alloy. In this way, the soft magnetic alloy having excellent magnetic characteristics of about >=10000 initial magnetic permeability and about <=50mOe coercive force can be obtd. |
