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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0357219(A)
申请公布日期
1991.03.12
申请号
JP19890191441
申请日期
1989.07.26
申请人
HITACHI LTD
发明人
KATTO HISAO
分类号
H01L21/3205;H01L23/52
主分类号
H01L21/3205
代理机构
代理人
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地址
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