DRIVING STAGE DEVICE AND ACTUATOR UNIT FOR SAME

摘要

PURPOSE:To improve responsiveness by driving a stage surface directly by actuator units (driving device) for one direction and one actuator unit (driving device) for an orthogonal direction. CONSTITUTION:The XYtheta driving stage device can drives the stage surface in an X and a Y direction and a rotational thetaZ direction in the XY plane. For example, when Z-directional actuator units 10e - 10g are disregarded, a body 3 to be driven is to move approximately in a +X direction by the +X- directional driving of and X-directional actuator unit 10a. At this time, the driven body 3 is low in X-directional rigidity to elastic link parts 9b and 9c of Y-directional actuator units 10b and 10c, so the driven body easily deforms elastically when receiving an X-directional force. Therefore, the driven body 3 is driven in the X direction by the X-directional actuator unit 10a.