发明名称 Bonding structure of substrates and method for bonding substrates
摘要 First and second substrates are provided with a projection of a high melting point conductive material and an aperture filled at the bottom plane with a low melting point conductive material, respectively. The projection of the first substrate is plunged into the low melting point conductive material which is molten in the aperture by heating, so that the projection and the low melting point conductive material are bonded mechanically and electrically by cooling.
申请公布号 US4998665(A) 申请公布日期 1991.03.12
申请号 US19890401980 申请日期 1989.09.01
申请人 NEC CORPORATION 发明人 HAYASHI, YOSHIHIRO
分类号 H01L21/60;H01L21/50;H01L21/98;H01L25/065;H01L29/41 主分类号 H01L21/60
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