| 摘要 |
A reticle conveying system includes a reticle keeping shelf for keeping therein a plurality of reticles; a first conveying portion for selecting and extracting a desired reticle out of the reticle keeping shelf and for conveying the extracted reticle to a predetermined position; and a second conveying portion for conveying the reticle from the predetermined position back into the reticle keeping shelf; wherein the first conveying portion is operable to convey the extracted reticle to the predetermined position by way of a first conveying path defined exclusively for the reticle as it is conveyed to the predetermined position and wherein said second conveying portion is operable to convey the reticle back into the reticle keeping shelf by way of a second conveying path different from the first conveying path and defined exclusively for the reticle as it is conveyed back into the reticle keeping shelf.
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