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发明名称
BONDING EQUIPMENT
摘要
申请公布号
JPH0355861(A)
申请公布日期
1991.03.11
申请号
JP19890191975
申请日期
1989.07.24
申请人
MITSUBISHI ELECTRIC CORP
发明人
YOSHIDA MASAHARU;YAMAMOTO AKIRA
分类号
H01L21/60
主分类号
H01L21/60
代理机构
代理人
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