发明名称 FILTER AND CLEAN ROOM USING SAME
摘要 <p>PURPOSE:To make it possible to surely capture foreign matters in a vaporized state by capturing matters to be removed contained in air streams by absorption using an absorbent and controlling the temperature of the absorbent by mean of a temperature control means to precisely control the absorption and desorption. CONSTITUTION:Matters to be removed contained in an air stream A are capture by absorption by means of absorbent 4a, 4b, while the temperature of the absorbent is controlled by means of a temperature control means, wherein, in normal operations, for example, the temperature of heat medium 3 flowing through a temperature control pipe 2 is cooled to a temperature sufficiently lower than room temperatures so that absorption powder of absorbent 4a, 4b applied to a main body 1 becomes maximum. In this manner, the air stream A having passed a filter becomes clean free from foreign matters in a vaporized state. For regenerating the absorbents, the temperature of the heat medium 3 to be passed through the pipe 2 is raised to an optimum temperature for absorption which is higher than the temperature during operation. As a result, absorption and desorption are surely controlled, making it possible to surely capture foreign matters in a vaporized state.</p>
申请公布号 JPH0356112(A) 申请公布日期 1991.03.11
申请号 JP19890191430 申请日期 1989.07.26
申请人 HITACHI LTD 发明人 KATO HARUO
分类号 F24F7/06;B01D39/14;B01D53/04 主分类号 F24F7/06
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