SEQUENCE CONTROL METHOD FOR BATCH PROCESS,申请号JP19890190439-传众专利搜索

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发明名称	SEQUENCE CONTROL METHOD FOR BATCH PROCESS
摘要
申请公布号	JPH0355605(A)	申请公布日期	1991.03.11
申请号	JP19890190439	申请日期	1989.07.25
申请人	JGC CORP;FUJI ELECTRIC CO LTD	发明人	MATSUDA SHIGEO;KITAMINE YASUO;TANAKA NOBUTAKA;IKOMA MASAKAZU;TAKISHITA HIDEAKI
分类号	G05B19/05	主分类号	G05B19/05
代理机构		代理人
主权项
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