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发明名称
FILM FORMING METHOD
摘要
申请公布号
JPH0355740(A)
申请公布日期
1991.03.11
申请号
JP19890189129
申请日期
1989.07.21
申请人
NEC KANSAI LTD
发明人
SUGIHARA KAZUO
分类号
H01J9/22
主分类号
H01J9/22
代理机构
代理人
主权项
地址
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